FOM Name: APT Cameca 3000XSi Atom Probe
Model: Cameca/Imago LEAP 3000X Si
Contact: John Jacobs (jacobs@engr.wisc.edu, 608-262-3787)
Center: NIAC
Location: MSE Room 173
The Cameca 3000 XSi Atom Probe performs 3D elemental/chemical composition measurements on solid samples at the atomic scale. The sample must be in the form of a sharp tip which is typically prepared using a focused ion beam (FIB) or electrochemical etching.
This is an accordion element with a series of buttons that open and close related content panels.
Configuration
Max. pulse frequency: 250 kHz
• Mass resolving power (typical): 1000 FWHM
• Min. temperature: 18 K
• Detection efficiency: 37%
• Pressure (typical): 10-11 torr
• Laser wavelength: 532 nm
• Laser pulse energy: 0.02 – 2 nJ
• Max voltage pulse: 1732 V
• Max DC voltage: 15 kV
• Max detection rate: 10%
• Acceptance angle: ca. 70°
• Lateral resolution: ca. 0.2 nm
• Depth resolution: ca. 0.1 nm
