Thermtec Metal Anneal Furnace

FOM Name:  CLAS Thermtec Metal Anneal Furnace
Make/Model:  Thermtec
Contact:  Kurt Kupcho (kakupcho@wisc.edu, 608-262-2982)
Center:  NFC
Location:  Engineering Centers Building 3rd Floor Cleanroom

The metal anneal system is located in the bottom tube and can process multiple wafers with the maximum wafer diameter of 4 inches.  This furnace tube provides control of gas flows via mass flow controllers.  Adjusting the set point of a digital temperature controller controls the temperature.  Ramping of temperatures is not programmable.

This instrument has material restrictions.  Consult the allowed materials list for this instrument in FOM.

This is an accordion element with a series of buttons that open and close related content panels.

Configuration

  • Nitrogen or forming gas backfill
  • Dedicated quartzware

Limitations

  • Minimum temperature 400C
  • Maximum temperature 1050C
  • 4” diameter wafers or smaller