Ellipsometer Woollam IR-VASE

FOM Name:  Ellipsometer IR VASE
Model Number:  J. A. Woollam Mark II IR-VASE
Contact: Anna Kiyanova (anna.kiyanova@wisc.edu, 608-263-1735)
Center:  SMCL
Location: B46 Engineering Hall

J.A.Woollam Mark II IR-VASE ellipsometer is a research-grade instrument that combines sensitivity to chemical composition of FTIR spectroscopy with sensitivity to very thin films of spectroscopic ellipsometry. IR-VASE offers a powerful non-contact non-destructive method to characterize optical constants (index of refraction, coefficient of extinction, anisotropy, Mueller matrix), film thickness, material composition, chemical structure, free charge carriers, electronic transitions, etc. in a wide spectral range from far to near infrared.

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  • Optical configuration: RCE (rotating compensator ellipsometer)
  • Spectral range: 1.7 – 30 micrometers (333 – 5900 cm-1)
  • Spectral resolution: 1 – 64 cm-1
  • Detector: DTGS
  • Angles of incidence: 26° – 90°
  • Max sample size: 200 mm x 200 mm, 20 mm thickness
  • Sample plane: vertical
  • Typical data acquisition rate (complete spectrum with 16 cm-1 resolution): 1 – 30 min
  • Accessory: HTC-100 heat stage, room temperature – 300 °C, 70° angle of incidence, passive cooling, 50 mm sample size