FOM Name: SIMS Cameca 4FE7
Model Number: Cameca 4f-E7
Contact: Jerry Hunter (jerry.hunter@wisc.edu, 608-263-1073)
Center: NIAC
Location: MSE Rm 105
The Cameca 4f-E7 provides depth profile and contamination analysis on a broad range of materials from semiconductors and metals to insulators.
It is equipped with oxygen and cesium primary ion sources for analysis of positive and negative secondary ions and a high resolution (30,000 m/dm) double focussing mass spectrometer.
This is an accordion element with a series of buttons that open and close related content panels.
Configuration
- O2+ and Cs+ primary ions
- 1keV-15keV primary beam energies
- Vacuum in the 1e-10 torr range gives ppm detection limits for atmospheric ions
- High resolution double focussing mass spectrometer for separation of mass interferences
Additional Information
