Structure analysis techniques are used to analyze structural properties of materials, such as, grain size, grain orientation and film thickness and density. The Wisconsin Centers for Nanoscale Technology has a host of techniques that provide information on structural properties.
Click the links below for more information.
Electron Backscatter Diffraction
Small Angle X-ray
Scattering
TEM Orientation Imaging
X-Ray Diffraction
X-Ray Reflectivity