NFC Fees

NFC Laboratory Rates

wdt_ID Resource INTERNAL EXTERNAL ACADEMIC EXTERNAL INDUSTRIAL
1 Cleanroom access fee $44.80 / month $50.80 /month $56.81 / month
2 Cleanroom use $41.51 / hour $62.27 / hour $103.78 / hour
3 Startup fee $214.20 $291.31 $535.50
4 Custom processing by staff $67.73 / hour $98.32 / hour $202.10 / hour
6 Training and staff support - Elionix GS-100 $53.55 / hour $98.32 / hour $202.10 / hour
7 Chemicals (see list of provided materials) $0.00 $0.00 $0.00
8 Deposition materials (non precious - see list) $0.00 $0.00 $0.00
9 Photoresists and developers (see list) $0.00 $0.00 $0.00
10 Deposition material - gold $88.89 / gram $88.89 / gram $88.89 / gram
12 Training on other tools $0.00 $0.00 $0.00
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Resource INTERNAL EXTERNAL ACADEMIC EXTERNAL INDUSTRIAL

NFC Tool Rates

wdt_ID Resource INTERNAL ACADEMIC INDUSTRIAL TYPE FOM name
1 E-beam photoresist spinner $33.99 / hour $0.00 / hour $0.00 / hour Additive CLAS E-beam Photoresist Spinner
2 Angstrom evaporator $33.99 / hour $50.98 / hour $83.23 / hour Additive DEP Angstrom Evaporator DEPOSIT
3 CVC sputter $33.99 / hour $50.98 / hour $83.23 / hour Additive DEP CVC Sputter DEPOSIT
4 Denton sputter $33.99 / hour $50.98 / hour $83.23 / hour Additive DEP Denton Sputter DEPOSIT
5 Dielectric evaporator $33.99 / hour $50.98 / hour $83.23 / hour Additive DEP Dielectric Evaporator DEPOSIT
6 Metal evaporator $33.99 / hour $50.98 / hour $83.23 / hour Additive DEP Metal Evaporator DEPOSIT
7 PECVD $33.99 / hour $50.98 / hour $83.23 / hour Additive ETCH PECVD
8 Spinner 1 - PR $33.99 / hour $0.00 / hour $0.00 / hour Additive LITH Spinner 1-- PR
9 Spinner 2 - PR including SU8 $33.99 / hour $0.00 / hour $0.00 / hour Additive LITH Spinner 2- PR including SU8
10 Spinner 3 - PR $33.99 / hour $0.00 / hour $0.00 / hour Additive LITH Spinner 3--PR
11 Indium evaporator $33.99 / hour $50.98 / hour $83.23 / hour Additive PKG Indium Evaporator DEPOSIT
12 Non-litho spincoat $33.99 / hour $0.00 / hour $0.00 / hour Additive WET Non-Litho Spin Coat
13 E-beam develop wet bench $48.20 / hour $73.73 / hour $374.85 / hour Lithography CLAS E-beam Develop Wet Bench
14 E-beam photoresist spinner $48.20 / hour $73.73 / hour $374.85 / hour Lithography CLAS E-beam Photoresist Spinner
15 Elionix GS-100 tool use $48.20 / hour $73.73 / hour $374.85 / hour Lithography EBL Elionix GS-100
16 Circuit board UV $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH Circuit Board UV
17 HMDS primer $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH HMDS primer
18 New MJB3 aligner $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH New MJB3 aligner
19 Old MJB3 aligner $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH Old MJB3 aligner
20 Solvent / Develop bench $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH Solvent / Develop Bench
21 SU-8 hotplate $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH SU-8 Hotplate
22 SU-8 solvent bench $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH SU-8 Solvent Bench
23 PR hotplates $48.20 / hour $73.73 / hour $374.85 / hour Lithography
24 Suss MA6 aligner $48.20 / hour $73.73 / hour $374.85 / hour Lithography LITH Suss MA6 aligner
25 Nikon i-line stepper $48.20 / hour $73.73 / hour $374.85 / hour Lithography STEP Nikon i-Line Stepper
26 Superior 4-pt probe $0.00 / hour $0.00 / hour $0.00 / hour Metrology CLAS 4-pt Probe
27 L200 microscope $0.00 / hour $0.00 / hour $0.00 / hour Metrology CLAS L200 Microscope
28 KLA-Tencor P7 profilometer $0.00 / hour $0.00 / hour $0.00 / hour Metrology DEP KLA-Tencor P7 Profilometer
29 Filmetrics F20 $0.00 / hour $0.00 / hour $0.00 / hour Metrology FURN Filmetrics F20
30 Thin film stress measurement $0.00 / hour $0.00 / hour $0.00 / hour Metrology FURN Thin Film Stress Measurement
31 Image capture $0.00 / hour $0.00 / hour $0.00 / hour Metrology STEP Image capture
32 Wafer bond aligner $33.29 / hour $50.98 / hour $83.23 / hour Assembly FURN Wafer Bond Aligner
33 Wafer bonder $33.29 / hour $50.98 / hour $83.23 / hour Assembly FURN Wafer Bonder
34 Diamond scribe $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Diamond Scribe
35 Dicing saw 1 $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Dicing Saw 1
36 Dicing saw 2 $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Dicing Saw 2
37 Die attacher $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Die Attacher
38 Gold ball wire bonder $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Gold Ball Wire Bonder
39 Package annealer $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Package Annealer
40 Wedge aluminum wire bonder $0.00 / hour $0.00 / hour $0.00 / hour Assembly PKG Wedge Aluminum Wire Bonder
41 Corrosives bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive CLAS Corrosives Bench
42 E-beam develop wet bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive CLAS E-beam Develop Wet Bench
43 Ion mill $33.29 / hour $50.98 / hour $83.23 / hour Subtractive DEP Ion Mill MILLING
44 ICP general plasma etcher $33.29 / hour $50.98 / hour $83.23 / hour Subtractive ETCH ICP General Plasma Etcher
45 ICP metal plasma etcher $48.90 / hour $72.83 / hour $122.77 / hour Subtractive ETCH ICP Metal Plasma Etcher
46 PECVD $33.29 / hour $50.98 / hour $83.23 / hour Subtractive ETCH PECVD
47 Plasma ashser $0.00 / hour $0.00 / hour $0.00 / hour Subtractive ETCH Plasma Asher
48 Reactive ion etcher $33.29 / hour $50.98 / hour $83.23 / hour Subtractive ETCH Reactive Ion Etcher
49 STS deep reactive ion Si etcher $48.90 / hour $72.83 / hour $122.77 / hour Subtractive ETCH STS Deep Reactive Ion Si Etcher
50 UV/Ozone cleaner $0.00 / hour $0.00 / hour $0.00 / hour Subtractive ETCH UV/Ozone Cleaner
51 XeF2 etcher $48.90 / hour $72.83 / hour $122.77 / hour Subtractive ETCH XeF2 Etcher
52 KOH bath 1 $0.00 / hour $0.00 / hour $0.00 / hour Subtractive PKG KOH Bath 1
53 KOH bath 2 - relaxed materials restrictions $0.00 / hour $0.00 / hour $0.00 / hour Subtractive PKG KOH Bath 2
54 Al etch bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive WET Al Etch Bench
55 BOE / HF bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive WET BOE / HF Bench
56 III - V Corrossives bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive WET III-V Corrosives Bench
57 Liftoff solvent bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive WET Liftoff Solvent Bench
58 Nitride etch bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive WET Nitride Etch Bench
59 Piranha bench $0.00 / hour $0.00 / hour $0.00 / hour Subtractive WET Piranha Bench
60 Thermtec metal anneal furnace $10.40 / hour $15.60 / hour $$26.01 / hour Thermal CLAS Thermtec Metal Anneal Furnace
61 Thermtec oxidation furnace $10.40 / hour $15.60 / hour $$26.01 / hour Thermal CLAS Thermtec Oxidation Furnace
62 MRL Tube 1 high temp anneal $10.40 / hour $15.60 / hour $$26.01 / hour Thermal FURN MRL Tube 1 High Temp Anneal
63 MRL Tube 2 high temp oxidation $10.40 / hour $15.60 / hour $$26.01 / hour Thermal FURN MRL Tube 2 High Temp Oxidation
64 MRL Tube 3 low temp oxidation $10.40 / hour $15.60 / hour $$26.01 / hour Thermal FURN MRL Tube 3 Low Temp Oxidation
65 MRL Tube 4 low temp anneal $10.40 / hour $15.60 / hour $$26.01 / hour Thermal FURN MRL Tube 4 Low Temp Anneal
66 MRL Tube 6 unique anneal $10.40 / hour $15.60 / hour $$26.01 / hour Thermal FURN MRL Tube 6 Unique Anneal
67 Pre-Furnace clean wet bench $0.00 / hour $0.00 / hour $0.00 / hour Thermal FURN Pre-Furnace Clean Wet Bench
68 Rapid thermal annealer $0.00 / hour $0.00 / hour $0.00 / hour Thermal FURN Rapid Thermal Annealer
69 Tystar high temp oxidation $10.40 / hour $15.60 / hour $$26.01 / hour Thermal FURN Tystar High Temp Oxidation
70 Tystar low temp oxidation $48.90 / hour $72.83 / hour $122.77 / hour Thermal FURN Tystar Low Temp Oxidation
71 Tystar LPCVD nitride $48.90 / hour $72.83 / hour $122.77 / hour Thermal FURN Tystar LPCVD Nitride
72 Tystar LPCVD polysilicon $48.90 / hour $72.83 / hour $122.77 / hour Thermal FURN Tystar LPCVD Polysilicon
73 Cooke vacuum annealer $0.00 / hour $0.00 / hour $0.00 / hour Thermal PKG Cooke Vacuum Annealer
74 Polymer oven $0.00 / hour $0.00 / hour $0.00 / hour Thermal PKG Polymer Oven
75 YES vacuum oven $0.00 / hour $0.00 / hour $0.00 / hour Thermal PKG YES Vacuum Oven
76 ICP III-V Plasma Etcher $48.90 / hour $72.83 / hour $122.77 / hour ETCH ICP III-V Plasma Etcher
77 Fiji Atomic Layer Deposition system $48.90 / hour $72.83 / hour $122.77 / hour CLAS Fiji ALD
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79 Heidelberg DWL66+ laswer writer 34.95 53.53 87.39 STEP Heidelberg laser writer
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81 $34.95 / hour
82 $ 53.53 / hour
83 $87.39 / hour
84 $34.95 / hour
Resource INTERNAL ACADEMIC INDUSTRIAL TYPE FOM name

SOFT CAP STRUCTURE: All charges per internal user, for hourly and equipment fees up to $739.72, are billed at 100%. Charges paid by the PI, between $739.72 and $1,224, are billed at 20% (80% price reduction). All charges over $1,224 paid by the PI are billed at 5% of the full charge. Staff processing fees and any recharged materials fees (such as precious metals in the deposition tools) are not capped.

CLEANUP FEE: When members no longer need access to the NFC labs, they are expected to complete a short checkout procedure, which includes removing any materials they own from the lab. Failure to clean out your stuff when you leave the lab may incur a $200 cleanup fee if NFC staff have to take care of it for you.

STOPPING AND RESTARTING LAB ACCESS:  Lab members who suspend or terminate their lab access and need to restart it will be charged the startup fee again.