NFC Laboratory Rates
| wdt_ID | Resource | INTERNAL | EXTERNAL ACADEMIC | EXTERNAL INDUSTRIAL |
|---|---|---|---|---|
| 1 | Cleanroom access fee | $44.80 / month | $50.80 /month | $56.81 / month |
| 2 | Cleanroom use | $41.51 / hour | $62.27 / hour | $103.78 / hour |
| 3 | Startup fee | $214.20 | $291.31 | $535.50 |
| 4 | Custom processing by staff | $67.73 / hour | $98.32 / hour | $202.10 / hour |
| 6 | Training and staff support - Elionix GS-100 | $53.55 / hour | $98.32 / hour | $202.10 / hour |
| 7 | Chemicals (see list of provided materials) | $0.00 | $0.00 | $0.00 |
| 8 | Deposition materials (non precious - see list) | $0.00 | $0.00 | $0.00 |
| 9 | Photoresists and developers (see list) | $0.00 | $0.00 | $0.00 |
| 10 | Deposition material - gold | $88.89 / gram | $88.89 / gram | $88.89 / gram |
| 12 | Training on other tools | $0.00 | $0.00 | $0.00 |
| 13 | ||||
| Resource | INTERNAL | EXTERNAL ACADEMIC | EXTERNAL INDUSTRIAL |
NFC Tool Rates
| wdt_ID | Resource | INTERNAL | ACADEMIC | INDUSTRIAL | TYPE | FOM name |
|---|---|---|---|---|---|---|
| 1 | E-beam photoresist spinner | $33.99 / hour | $0.00 / hour | $0.00 / hour | Additive | CLAS E-beam Photoresist Spinner |
| 2 | Angstrom evaporator | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Angstrom Evaporator DEPOSIT |
| 3 | CVC sputter | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP CVC Sputter DEPOSIT |
| 4 | Denton sputter | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Denton Sputter DEPOSIT |
| 5 | Dielectric evaporator | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Dielectric Evaporator DEPOSIT |
| 6 | Metal evaporator | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Metal Evaporator DEPOSIT |
| 7 | PECVD | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | ETCH PECVD |
| 8 | Spinner 1 - PR | $33.99 / hour | $0.00 / hour | $0.00 / hour | Additive | LITH Spinner 1-- PR |
| 9 | Spinner 2 - PR including SU8 | $33.99 / hour | $0.00 / hour | $0.00 / hour | Additive | LITH Spinner 2- PR including SU8 |
| 10 | Spinner 3 - PR | $33.99 / hour | $0.00 / hour | $0.00 / hour | Additive | LITH Spinner 3--PR |
| 11 | Indium evaporator | $33.99 / hour | $50.98 / hour | $83.23 / hour | Additive | PKG Indium Evaporator DEPOSIT |
| 12 | Non-litho spincoat | $33.99 / hour | $0.00 / hour | $0.00 / hour | Additive | WET Non-Litho Spin Coat |
| 13 | E-beam develop wet bench | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | CLAS E-beam Develop Wet Bench |
| 14 | E-beam photoresist spinner | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | CLAS E-beam Photoresist Spinner |
| 15 | Elionix GS-100 tool use | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | EBL Elionix GS-100 |
| 16 | Circuit board UV | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH Circuit Board UV |
| 17 | HMDS primer | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH HMDS primer |
| 18 | New MJB3 aligner | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH New MJB3 aligner |
| 19 | Old MJB3 aligner | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH Old MJB3 aligner |
| 20 | Solvent / Develop bench | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH Solvent / Develop Bench |
| 21 | SU-8 hotplate | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH SU-8 Hotplate |
| 22 | SU-8 solvent bench | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH SU-8 Solvent Bench |
| 23 | PR hotplates | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | |
| 24 | Suss MA6 aligner | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | LITH Suss MA6 aligner |
| 25 | Nikon i-line stepper | $48.20 / hour | $73.73 / hour | $374.85 / hour | Lithography | STEP Nikon i-Line Stepper |
| 26 | Superior 4-pt probe | $0.00 / hour | $0.00 / hour | $0.00 / hour | Metrology | CLAS 4-pt Probe |
| 27 | L200 microscope | $0.00 / hour | $0.00 / hour | $0.00 / hour | Metrology | CLAS L200 Microscope |
| 28 | KLA-Tencor P7 profilometer | $0.00 / hour | $0.00 / hour | $0.00 / hour | Metrology | DEP KLA-Tencor P7 Profilometer |
| 29 | Filmetrics F20 | $0.00 / hour | $0.00 / hour | $0.00 / hour | Metrology | FURN Filmetrics F20 |
| 30 | Thin film stress measurement | $0.00 / hour | $0.00 / hour | $0.00 / hour | Metrology | FURN Thin Film Stress Measurement |
| 31 | Image capture | $0.00 / hour | $0.00 / hour | $0.00 / hour | Metrology | STEP Image capture |
| 32 | Wafer bond aligner | $33.29 / hour | $50.98 / hour | $83.23 / hour | Assembly | FURN Wafer Bond Aligner |
| 33 | Wafer bonder | $33.29 / hour | $50.98 / hour | $83.23 / hour | Assembly | FURN Wafer Bonder |
| 34 | Diamond scribe | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Diamond Scribe |
| 35 | Dicing saw 1 | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Dicing Saw 1 |
| 36 | Dicing saw 2 | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Dicing Saw 2 |
| 37 | Die attacher | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Die Attacher |
| 38 | Gold ball wire bonder | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Gold Ball Wire Bonder |
| 39 | Package annealer | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Package Annealer |
| 40 | Wedge aluminum wire bonder | $0.00 / hour | $0.00 / hour | $0.00 / hour | Assembly | PKG Wedge Aluminum Wire Bonder |
| 41 | Corrosives bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | CLAS Corrosives Bench |
| 42 | E-beam develop wet bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | CLAS E-beam Develop Wet Bench |
| 43 | Ion mill | $33.29 / hour | $50.98 / hour | $83.23 / hour | Subtractive | DEP Ion Mill MILLING |
| 44 | ICP general plasma etcher | $33.29 / hour | $50.98 / hour | $83.23 / hour | Subtractive | ETCH ICP General Plasma Etcher |
| 45 | ICP metal plasma etcher | $48.90 / hour | $72.83 / hour | $122.77 / hour | Subtractive | ETCH ICP Metal Plasma Etcher |
| 46 | PECVD | $33.29 / hour | $50.98 / hour | $83.23 / hour | Subtractive | ETCH PECVD |
| 47 | Plasma ashser | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | ETCH Plasma Asher |
| 48 | Reactive ion etcher | $33.29 / hour | $50.98 / hour | $83.23 / hour | Subtractive | ETCH Reactive Ion Etcher |
| 49 | STS deep reactive ion Si etcher | $48.90 / hour | $72.83 / hour | $122.77 / hour | Subtractive | ETCH STS Deep Reactive Ion Si Etcher |
| 50 | UV/Ozone cleaner | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | ETCH UV/Ozone Cleaner |
| 51 | XeF2 etcher | $48.90 / hour | $72.83 / hour | $122.77 / hour | Subtractive | ETCH XeF2 Etcher |
| 52 | KOH bath 1 | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | PKG KOH Bath 1 |
| 53 | KOH bath 2 - relaxed materials restrictions | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | PKG KOH Bath 2 |
| 54 | Al etch bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | WET Al Etch Bench |
| 55 | BOE / HF bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | WET BOE / HF Bench |
| 56 | III - V Corrossives bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | WET III-V Corrosives Bench |
| 57 | Liftoff solvent bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | WET Liftoff Solvent Bench |
| 58 | Nitride etch bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | WET Nitride Etch Bench |
| 59 | Piranha bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Subtractive | WET Piranha Bench |
| 60 | Thermtec metal anneal furnace | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | CLAS Thermtec Metal Anneal Furnace |
| 61 | Thermtec oxidation furnace | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | CLAS Thermtec Oxidation Furnace |
| 62 | MRL Tube 1 high temp anneal | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | FURN MRL Tube 1 High Temp Anneal |
| 63 | MRL Tube 2 high temp oxidation | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | FURN MRL Tube 2 High Temp Oxidation |
| 64 | MRL Tube 3 low temp oxidation | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | FURN MRL Tube 3 Low Temp Oxidation |
| 65 | MRL Tube 4 low temp anneal | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | FURN MRL Tube 4 Low Temp Anneal |
| 66 | MRL Tube 6 unique anneal | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | FURN MRL Tube 6 Unique Anneal |
| 67 | Pre-Furnace clean wet bench | $0.00 / hour | $0.00 / hour | $0.00 / hour | Thermal | FURN Pre-Furnace Clean Wet Bench |
| 68 | Rapid thermal annealer | $0.00 / hour | $0.00 / hour | $0.00 / hour | Thermal | FURN Rapid Thermal Annealer |
| 69 | Tystar high temp oxidation | $10.40 / hour | $15.60 / hour | $$26.01 / hour | Thermal | FURN Tystar High Temp Oxidation |
| 70 | Tystar low temp oxidation | $48.90 / hour | $72.83 / hour | $122.77 / hour | Thermal | FURN Tystar Low Temp Oxidation |
| 71 | Tystar LPCVD nitride | $48.90 / hour | $72.83 / hour | $122.77 / hour | Thermal | FURN Tystar LPCVD Nitride |
| 72 | Tystar LPCVD polysilicon | $48.90 / hour | $72.83 / hour | $122.77 / hour | Thermal | FURN Tystar LPCVD Polysilicon |
| 73 | Cooke vacuum annealer | $0.00 / hour | $0.00 / hour | $0.00 / hour | Thermal | PKG Cooke Vacuum Annealer |
| 74 | Polymer oven | $0.00 / hour | $0.00 / hour | $0.00 / hour | Thermal | PKG Polymer Oven |
| 75 | YES vacuum oven | $0.00 / hour | $0.00 / hour | $0.00 / hour | Thermal | PKG YES Vacuum Oven |
| 76 | ICP III-V Plasma Etcher | $48.90 / hour | $72.83 / hour | $122.77 / hour | ETCH ICP III-V Plasma Etcher | |
| 77 | Fiji Atomic Layer Deposition system | $48.90 / hour | $72.83 / hour | $122.77 / hour | CLAS Fiji ALD | |
| 78 | ||||||
| 79 | Heidelberg DWL66+ laswer writer | 34.95 | 53.53 | 87.39 | STEP Heidelberg laser writer | |
| 80 | ||||||
| 81 | $34.95 / hour | |||||
| 82 | $ 53.53 / hour | |||||
| 83 | $87.39 / hour | |||||
| 84 | $34.95 / hour | |||||
| Resource | INTERNAL | ACADEMIC | INDUSTRIAL | TYPE | FOM name |
SOFT CAP STRUCTURE: All charges per internal user, for hourly and equipment fees up to $739.72, are billed at 100%. Charges paid by the PI, between $739.72 and $1,224, are billed at 20% (80% price reduction). All charges over $1,224 paid by the PI are billed at 5% of the full charge. Staff processing fees and any recharged materials fees (such as precious metals in the deposition tools) are not capped.
CLEANUP FEE: When members no longer need access to the NFC labs, they are expected to complete a short checkout procedure, which includes removing any materials they own from the lab. Failure to clean out your stuff when you leave the lab may incur a $200 cleanup fee if NFC staff have to take care of it for you.
STOPPING AND RESTARTING LAB ACCESS: Lab members who suspend or terminate their lab access and need to restart it will be charged the startup fee again.