NFC Laboratory Rates
| wdt_ID | Resource | INTERNAL | EXTERNAL ACADEMIC | EXTERNAL INDUSTRIAL |
|---|---|---|---|---|
| 1 | Cleanroom access fee | $42.66 / month | $48.38 / month | $54.10 / month |
| 2 | Cleanroom use | $39.54 / hour | $59.30 / hour | $98.84 / hour |
| 3 | One-time startup fee | $208.08 | $282.99 | $520.20 |
| 4 | Custom processing by staff | $64.50 / hour | $93.64 / hour | $192.47 / hour |
| 6 | Training and staff support - Elionix GS-100 | $51.00 / hour | $93.64 / hour | $192.47 / hour |
| 7 | Chemicals (see list of provided materials) | $0.00 | $0.00 | $0.00 |
| 8 | Deposition materials (non precious - see list) | $0.00 | $0.00 | $0.00 |
| 9 | Photoresists and developers (see list) | $0.00 | $0.00 | $0.00 |
| 10 | Deposition material - gold | $0.62 / nm deposited | $0.62 / nm deposited | $0.62 / nm deposited |
| 12 | Training on other tools | $0.00 | $0.00 | $0.00 |
| Resource | INTERNAL | EXTERNAL ACADEMIC | EXTERNAL INDUSTRIAL |
NFC Tool Rates
| wdt_ID | Resource | INTERNAL | ACADEMIC | INDUSTRIAL | TYPE | FOM name |
|---|---|---|---|---|---|---|
| 1 | E-beam photoresist spinner | $0.00 / hour | $0.00 / hour | $0.00 / hour | Additive | CLAS E-beam Photoresist Spinner |
| 2 | Angstrom evaporator | $33.29 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Angstrom Evaporator DEPOSIT |
| 3 | CVC sputter | $33.29 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP CVC Sputter DEPOSIT |
| 4 | Denton sputter | $33.29 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Denton Sputter DEPOSIT |
| 5 | Dielectric evaporator | $33.29 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Dielectric Evaporator DEPOSIT |
| 6 | Metal evaporator | $33.29 / hour | $50.98 / hour | $83.23 / hour | Additive | DEP Metal Evaporator DEPOSIT |
| 7 | PECVD | $33.29 / hour | $50.98 / hour | $83.23 / hour | Additive | ETCH PECVD |
| 8 | Spinner 1 - PR | $0.00 / hour | $0.00 / hour | $0.00 / hour | Additive | LITH Spinner 1-- PR |
| 9 | Spinner 2 - PR including SU8 | $0.00 / hour | $0.00 / hour | $0.00 / hour | Additive | LITH Spinner 2- PR including SU8 |
| 10 | Spinner 3 - PR | $0.00 / hour | $0.00 / hour | $0.00 / hour | Additive | LITH Spinner 3--PR |
| Resource | INTERNAL | ACADEMIC | INDUSTRIAL | TYPE | FOM name |
SOFT CAP STRUCTURE: All charges per internal user, for hourly and equipment fees up to $739.72, are billed at 100%. Charges paid by the PI, between $739.72 and $1,224, are billed at 20% (80% price reduction). All charges over $1,224 paid by the PI are billed at 5% of the full charge. Staff processing fees and any recharged materials fees (such as precious metals in the deposition tools) are not capped.
CLEANUP FEE: When members no longer need access to the NFC labs, they are expected to complete a short checkout procedure, which includes removing any materials they own from the lab. Failure to clean out your stuff when you leave the lab may incur a $200 cleanup fee if NFC staff have to take care of it for you.