FOM Name: LITH New MJB3 Aligner
Model:
Contact: Quinn Leonard (qleonard@wisc.edu, 608-890-3030)
Center: NFC
Location: Engineering Centers Building 3rd Floor Cleanroom
NFC has two MJB-3 aligners. The standard MJB 3 aligner is equipped with a 200 watt mercury short-arc lamp and the second aligner is equipped with a 350 watt mercury short-arc lamp. The filtered light source produces a combination of g-line, h-line and i-line wavelengths (320-500nm). Optimum line/space resolution is 1.5 microns. The alignment range of the X and Y is 6mm and the Theta range is 30°. Alignment is performed manually by manipulating micrometers while observing the wafer and mask with a microscope. A quartz mask is recommended for wavelengths of 320nm while sodium glass masks are adequate for longer wavelengths.
