Zeiss Gemini 450 FESEM

FOM Name:  SEM Zeiss/Gemini 450
Contact: Rick Noll (noll@engr.wisc.edu, 608-263-3667)
Location: MSE Room 165

The Zeiss GeminiSEM 450 is a high-performance variable pressure Scanning Electron Microscope (SEM) equipped with a Schottky type field emission gun, various detectors (in-lens and Everhart-Thornley type secondary electron detectors, as well as a variable pressure secondary electron detector, an in-lens back scattered electron detector, and multi-quadrant solid state back-scattered electron detector). In addition, there is a detector for energy-dispersive x-ray analysis. The GeminiSEM 450 is a modern SEM, but is very similar to the older  LEO 1530 SEM and Zeiss Auriga FIB in the NIAC. This system has an oil free vacuum system to maintain hydrocarbon free imaging.   To ensure the clean environment, the SEM is equipped with an in situ reactive oxygen sample cleaning system.

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  • Accelerating voltage: 50 V to 30 kV.
  • Image resolution: 0.7 nm at 15 kV, 1.2 nm at 1 kV.
  • Probe current: 3 pA-100 nA.
  • In column (In-lens) secondary electron detector: high resolution surface detail; used up to 20 kV.
  • In column (In-lens) back-scattered electron detector (low accelerating voltage back-scattered imaging).
  • Chamber-mount (Everhart-Thornley) secondary electron detector: best view of three dimensional morphology; works at all accelerating voltages.
  • Chamber-mount variable pressure secondary electron detector.
  • Chamber-mount angular resolved solid-state multi-quadrant back-scattered electron detector.
  • EDS: Thermo Noran Energy dispersive X-ray microanalysis system; light element detection limit of boron.
  • Sample stage: motorized 130 mm X/Y travel, 50 mm Z travel, -4° to 70° tilt, 360 ° rotation.
  • In situ sample cleaning system.
  • Available ancillary equipement: Leica ACE 600 coating system; Leica TIC3X Triple ION Beam Miller for large sample cross-sectioning and surface polishing for EBSD.