FOM Name: SEM Zeiss/LEO 1530-1
Manufacturer/Model: Zeiss 1530
Contact: Julie Morasch (morasch@wisc.edu, 608-262-3613)
Center: NIAC
Location: MSE Room 171
The LEO 1530 is a state-of-the-art scanning electron microscope (SEM) that uses a Schottky-type field-emission electron source. A beam booster is used to maintain optimum electron optical performance at all accelerating voltages. In addition, the patented Gemini optical column has no crossovers and utilizes a magnetic/electrostatic objective lens for outstanding imaging capabilities, especially at low voltage (due to reduced chromatic aberration).
This is an accordion element with a series of buttons that open and close related content panels.
Configuration
Secondary Electron Detectors (SE)
- Conventional Everhart-Thornley detector in the chamber
- In-lens detector, which utilizes secondary electrons, captured by the objective lens field providing excellent surface detail
Backscattered Electron Detector (BSE)
- Optimized for low voltage operation
Energy Dispersive Analysis System (EDS)
- Contains a state-of-the-art detector with a resolution of 129 eV at Manganese and a light element detection limit of Boron
Electron Backscattered Kikuchi Pattern Detector (EBKP)
- Can collect patterns, analyze and store the data at the rate of one point every two seconds
- Allows an array of 27,000 points to be analyzed in a typical 15 hour period
Performance Specifications
Superb image resolution
- rated resolution is 1.2 nm at 20 kV
- 2.5 nm at 5 kV
- 40 nm at 1 kV
Designed to perform EDS analysis, BSE imaging and high resolution SE imaging
- standard working distance of (8 mm)
- allows up to 45° of tilt
EDS system has a state-of-the-art detector
- resolution of 129 eV at manganese
- a light element detection limit of boron
