Zeiss LEO 1530-1 FESEM/EDS/EBSD

FOM Name:  SEM Zeiss/LEO 1530-1
Manufacturer/Model:  Zeiss 1530
Contact: Rick Noll (noll@engr.wisc.edu, 608-263-3667)
Center:  NIAC
Location: MSE Room 171

The LEO 1530 is a state-of-the-art scanning electron microscope (SEM) that uses a Schottky-type field-emission electron source. A beam booster   is used to maintain optimum electron optical performance at all accelerating voltages. In addition, the patented Gemini optical column has no crossovers and utilizes a magnetic/electrostatic objective lens for  outstanding imaging capabilities, especially at low voltage (due to reduced  chromatic aberration).

This is an accordion element with a series of buttons that open and close related content panels.

Configuration

Secondary Electron Detectors (SE)

  • Conventional Everhart-Thornley detector in the chamber
  • In-lens detector, which utilizes secondary electrons, captured by the objective lens field providing excellent surface detail

Backscattered Electron Detector (BSE)

  • Optimized for low voltage operation

Energy Dispersive Analysis System (EDS)

  • Contains a state-of-the-art detector with a resolution of 129 eV at Manganese and a light element detection limit of Boron

Electron Backscattered Kikuchi Pattern Detector (EBKP)

  • Can collect patterns, analyze and store the data at the rate of one point every two seconds
  • Allows an array of 27,000 points to be analyzed in a typical 15 hour period

Performance Specifications

Superb image resolution

  • rated resolution is 1.2 nm at 20 kV
  • 2.5 nm at 5 kV
  • 40 nm at 1 kV

Designed to perform EDS analysis, BSE imaging and high resolution SE imaging

  • standard working distance of (8 mm)
  • allows up to 45° of tilt

EDS system has a state-of-the-art detector

  • resolution of 129 eV at manganese
  • a light element detection limit of boron