FOM Name: WET Non-litho spin coat
Make/Model: Headway Research
Contact: Quinn Leonard (qleonard@wisc.edu, 608-890-3030)
Center: NFC
Location: Engineering Centers Building 3rd Floor Cleanroom
This spincoater is used for applying liquids other than photoresists to wafer surfaces. Examples of allowed materials include spin-on glass and spin-on dopants.
