AccuThermo AW610M Rapid Thermal Annealer

FOM Name:  FURN High Temp RTA
Make/Model:  Allwin21 Corp., AccuThermo AW610M
Contact: Ming-Wei Lin,
Center: NFC
Location: Engineering Centers Building 3rd Floor Cleanroom

The AccuThermo AW610M is a rapid thermal system that uses high-intensity visible radiation to heat single wafers for 1-600 seconds.
This instrument has material restrictions.  Consult the allowed materials list for this instrument in FOM

This is an accordion element with a series of buttons that open and close related content panels.


  • The temperature range is 550 – 1150ºC and controlled with pyrometer temperature sensor.
  • The heating rate is user controlled at 1–200ºC per second.
  • The chamber is cooled using nitrogen gas.
  • The MFC-controlled process gases are nitrogen and 5% hydrogen balanced in nitrogen.
  • The quartz wafer tray is sized for a 3,4 or 6-inch wafer.