Thermtec Oxidation Furnace

FOM Name:  CLAS Thermtec Oxidation Furnace
Make/Model:  Thermtec
Contact:  Kurt Kupcho (kakupcho@wisc.edu, 608-262-2982)
Center:  NFC
Location:  Engineering Centers Building 3rd Floor Cleanroom

The oxidation system is located in the top tube and can process multiple wafers with the maximum wafer diameter of 4 inches.  This furnace tube uses a microprocessor sequencer to automatically control the tube temperature and gas flow.  Wafers are loaded on boats and transferred into the tube by the operator using a push rod.  Various recipes have been developed to offer dry oxidations, wet oxidations or nitrogen anneals.

This instrument has material restrictions.  Consult the allowed materials list for this instrument in FOM.

This is an accordion element with a series of buttons that open and close related content panels.

Configuration

  • O2, N2, and steam process gases
  • Dedicated quartzware

Limitations

  • Minimum temperature 7500C
  • Maximum temperature 1050C
  • 4” diameter wafers or smaller