Cooke Vacuum Annealer

FOM Name:  PKG Cooke Vacuum Annealer
Make/Model:  Cooke Vacuum Products 
Contact:  Kurt Kupcho (, 608-262-2782)
Center:  NFC
Location:  Engineering Centers Building 3rd Floor Cleanroom

The Cooke vacuum annealer is for curing polyimides at high temperatures under vacuum using nitrogen as an inert backfill gas.  The system has a mechanical vacuum pump for producing a vacuum in the chamber and uses a Watlow controller for automatic annealing recipes.

This instrument has material restrictions.  Consult the allowed materials list for this instrument in FOM.

This is an accordion element with a series of buttons that open and close related content panels.


  • Vacuum down to 100mT
  • N2 backfill gas
  • Automated heating recipe control
  • Dish to put your sample in


  • Maximum temperature of 400C
  • Samples smaller than 6 inches in diameter