MRL Tube 3 Low Temp Oxidation Furnace

FOM Name:  FURN MRL Tube 3 Low Temp Oxidation
Make/Model:  MRL Cyclone
Contact:  Kurt Kupcho (, 608-262-2982)
Center:  NFC
Location:  Engineering Centers Building 3rd Floor Cleanroom

The low temp oxidation system is located in Tube 3 of the MRL furnaces and can process small pieces, 3, 4 and 6-inch wafers.  The system uses a microprocessor sequencer to automatically control the in and out movement of the cantilever, tube temperature and gas flow.  Wafers are loaded on quartz boats and transferred into the tube at a slow controlled pace.  Users can run recipes for dry oxidations, wet oxidations or anneals.  Recipe temperatures range from 380°C to 700°C.

This instrument has material restrictions.  Consult the allowed materials list for this instrument in FOM.

This is an accordion element with a series of buttons that open and close related content panels.


  • Nitrogen backfill option for just annealing
  • Wet oxidation via steam
  • Dry oxidation via O2 gas
  • Automatic recipe operation
  • Dedicated quartzware


  • Minimum temperature 380C
  • Maximum temperature 700C