FOM Name: FURN Tystar High Temp Oxidation
Make/Model: Tystar Titan Mini 6
Contact: Kurt Kupcho (firstname.lastname@example.org, 608-262-2982)
Location: Engineering Centers Building 3rd Floor Cleanroom
The oxidation system located in Tube 1 of the Tystar furnaces can process small pieces, 3, 4 and 6-inch wafers. The system uses a microprocessor sequencer to automatically control the in and out movement of the cantilever, the tube temperature and gas flow. Wafers are loaded on quartz boats and transferred into the tube at a slow controlled pace. Users can run recipes for dry or wet oxidations. Recipe temperatures range from 900°C to 1050°C. A pre-furnace clean of all samples going into this furnace is required.
This instrument has material restrictions. Consult the allowed materials list for this instrument in FOM.
This is an accordion element with a series of buttons that open and close related content panels.
- Wet oxidation via H2 and O2 gases
- Dry oxidation via O2 gas
- Automatic recipe operation
- Dedicated quartzware
- Sample must go directly into furnace after pre-furnace clean
- Minimum temperature 750C
- Maximum temperature 1050C