BOE / HF Wet Bench

FOM Name:  WET BOE / HF Bench
Contact: Quinn Leonard (, 608-890-3030)
Center:  NFC
Location: Engineering Centers Building 3rd Floor Cleanroom

The BOE chemical bench has two process tanks prepared with 6:1 and 15:1 solutions.  The bench is equipped with one cascade rinse tank, sink, and two process tanks which have filtration systems and timers.  Various wafer and piece holders are provided.

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