FOM Name: WET BOE / HF Bench
Model:
Contact: Quinn Leonard (qleonard@wisc.edu, 608-890-3030)
Center: NFC
Location: Engineering Centers Building 3rd Floor Cleanroom
The BOE chemical bench has two process tanks prepared with 6:1 and 15:1 solutions. The bench is equipped with one cascade rinse tank, sink, and two process tanks which have filtration systems and timers. Various wafer and piece holders are provided.
This is an accordion element with a series of buttons that open and close related content panels.
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