FOM Name: WET BOE / HF Bench
Contact: Quinn Leonard (firstname.lastname@example.org, 608-890-3030)
Location: Engineering Centers Building 3rd Floor Cleanroom
The BOE chemical bench has two process tanks prepared with 6:1 and 15:1 solutions. The bench is equipped with one cascade rinse tank, sink, and two process tanks which have filtration systems and timers. Various wafer and piece holders are provided.
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