FOM Name: WET III-V Corrosives Bench
Model: FutureFab
Contact: Quinn Leonard (qleonard@wisc.edu, 608-890-3030)
Center: NFC
Location: Engineering Centers Building 3rd Floor Cleanroom
This chemical bench supports primarily subtractive processes involving the immersion of samples in liquid chemicals.
The bench is equipped with sinks and DI water. Processes involving both acids and bases are allowed at this bench.
Due to safety and contamination considerations, materials allowed in this tool are restricted. See the list of allowed materials in FOM.
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