Nitride Etch Bench

FOM Name:  WET Nitride Etch Bench
Contact: Quinn Leonard (, 608-890-3030)
Center:  NFC
Location: Engineering Centers Building 3rd Floor Cleanroom

The nitride strip chemical bench has one process tank containing a phosphoric acid solution and one quick dump rinse tank (QDR).  The bench is equipped with two wafer holders and one holder for wafer pieces.  The process tank bath consists of a Fluoropolymer tank, an immersion heater, and a condensing head with coils.  When the system achieves 170ºC the condensing coils and a make-up DI drip are activated to maintain the proper water concentration in the phosphoric acid.  A level sensor monitors the solution level in the tank and will alarm when a low liquid level is detected.