Liftoff Photoresist Solvent Wet Bench

FOM Name:  WET Liftoff Solvent Bench
Contact: Quinn Leonard (, 608-890-3030)
Center:  NFC
Location: Engineering Centers Building 3rd Floor Cleanroom

The chemical bench has with two temperature-controlled, explosion-proof hotplates, one ultrasonic tank, one quick dump rinser (QDR) and one sink.  The hotplate temperatures are controlled via a closed-loop control system with redundant over-temperature safety interlocks.  The bench touch-screen controller allows programming of the ultrasonic timing and QDR functions.

This is an accordion element with a series of buttons that open and close related content panels.