Leica ACE600 Sputter Deposition system

FOM Name:  Prep-Leica ACE600 Deposition
Manufacturer/Model:  Leica ACE600
Contact: Rick Noll (noll@engr.wisc.edu, 608-263-3667)
Center:  NIAC
Location: MSE Room 161

The Leica EM ACE600 offers coating methods using sputtering, carbon thread, carbon rod and e-beam evaporation, using up to two methods at the same time. This is realized with angled sources attached to a metal vacuum chamber and a rotating stage to allow evenly distributed films on a stage size over 100mm. Glow discharge can be performed to make grids hydrophilic and an integrated quartz crystal measurement device accurately determines the layer thickness.

This is an accordion element with a series of buttons that open and close related content panels.

Configuration

The Lieca EM 600 coating system includes:

  • Vacuum chamber
  • Touch screen control panel
  • Rotating sample stage, 24 positions for 12, 7mm SEM stubs
  • Removable shielding, shutter and door
  • Quartz (QSG) thickness measurement
  • Carbon thread deposition head
  • Planetary drive stage
  • Automated height and tilt adjustment
  • Sample stage for two 3″ x 1″ glass slides
  • Glow discharge