FOM Name: Ellipsometer SE1000
Model: Semilab SE-1000
Contact: Anna Kiyanova (anna.kiyanova@wisc.edu, 608-263-1735)
Center: SMCL
Location: B46 Engineering Hall
Semilab SE-1000 spectroscopic ellipsometer is a state-of-the-art rotating compensator visible range ellipsometer which measures changes in the state of polarization of a light beam reflected from sample surfaces. Two ellipsometric parameters – angles Psi and Delta – can be used to calculate the optical constants of bare surfaces, and the thickness and refractive index of thin films on those surfaces.
This is an accordion element with a series of buttons that open and close related content panels.
Configuration
- Wavelength range: 350 nm – 990 nm.
- Accuracy for std. reference material (120 nm SiO2 on Si): thickness: better than 0.9 nm; refracive index: better than 0.009.
- Angle of incidence: 70°. Additional angles: 60°, 65°, 75°, 90° (please contact staff for availability).
- Max sample size: 6″ x 6″ (15 cm x 15 cm)
- Sample plane: horizontal
- Sample stage adjustments: height, tilt
- Typical time for 1 full range measurement: 1 – 10 s
- Spot size on sample with Microspot optics: 0.365 mm x 0.47 mm (for 75°)
- Mueller Matrix: 12 elements (3 first columns) of the Mueller matrix normalized to (1,1) element are available.
