Ellipsometer Verity

FOM Name:  Ellipsometer Verity
Model:  Verity
Contact: Anna Kiyanova (anna.kiyanova@wisc.edu, 608-263-1735)
Center:  SMCL
Location: B18 Engineering Hall

Spectroscopic Ellipsometer Verity equipped with the Environmental/Vacuum sample chamber is a unique custom-made instrument to study thermal transitions and film-vapor interaction in thin-film coatings. The sample temperature can vary in a wide range following a user-defined program. The sample chamber can be pumped down to 10-7 Torr residual pressure range using oil-free pumping system to prevent contamination and oxidation of the sample at high temperatures. The precision solvent vapor pressure control system is able to create solvent vapor atmosphere over the sample following a user-defined pressure program. Ellipsometric measurements are performed in-situ in a continuous manner during both vapor and thermal treatments.


  • M. Yu. Efremov and P. F. Nealey, Ellipsometry-based combination of isothermal sorption-desorption measurement and temperature programmed desorption technique: A probe for interaction of thin polymer films with solvent vapor, Review of Scientific Instruments, Vol. 89, 055114 (2018).
  • M. Yu. Efremov, S. S. Soofi, A. V. Kiyanova, C. J. Munoz, P. Burgardt, F. Cerrina, and P. F. Nealey, Vacuum ellipsometry as a method for probing glass transition in thin polymer films, Review of Scientific Instruments, Vol. 79, 043903 (2008).

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  • Probing light wavelength: 400 – 1000 nm
  • Incident angle: 70°
  • Temperature range: -10 – 200 °C
  • Vapor pressure range: 0 – 100 Torr
  • Substrate size: 1.5″ x 1.5″
  • Vapor chemistry: should be compatible with Viton seals and aluminum/copper hardware