Gold Chrom Evaporator Veeco CNTech

FOM Name:  Gold Chrome Evaporator
Model:  Veeco-CNTech 
Contact: Anna Kiyanova (, 608-263-1735)
Center:  SMCL
Location: B47 Engineering Hall

Gold/Chrom thermal evaporator employs resistive heating of chromium rods and gold pellets in a tungsten boat to evaporate these metals. Substrates are mounted upside down on a mounting plates using rails for 4″ wafers or 1″ spaced holes and stainless steel hardware. There are no limitations on a shape and composition of the subtrates as far as they do not contaminate the chamber. Glow discharge pre-treatment is available. Working pressure is in the 10-7 torr range. Vacuum pumps are oil-free. Deposited film thickness is monitored by a standard quartz microbalance.


This is an accordion element with a series of buttons that open and close related content panels.


  • Mounting plate diameter: 19″
  • Vacuum pumps: Scroll (roughing), cryo-absorption (second stage)
  • Typical pumping down time: 3 hours (starting from warm cryopump)
  • Metals in stock: Chromium, gold