FOM Name: Gold Chrome Evaporator
Model: Veeco-CNTech
Contact: Anna Kiyanova (anna.kiyanova@wisc.edu, 608-263-1735)
Center: SMCL
Location: B47 Engineering Hall
Gold/Chrom thermal evaporator employs resistive heating of chromium rods and gold pellets in a tungsten boat to evaporate these metals. Substrates are mounted upside down on a mounting plates using rails for 4″ wafers or 1″ spaced holes and stainless steel hardware. There are no limitations on a shape and composition of the subtrates as far as they do not contaminate the chamber. Glow discharge pre-treatment is available. Working pressure is in the 10-7 torr range. Vacuum pumps are oil-free. Deposited film thickness is monitored by a standard quartz microbalance.
This is an accordion element with a series of buttons that open and close related content panels.
Configuration
- Mounting plate diameter: 19″
- Vacuum pumps: Scroll (roughing), cryo-absorption (second stage)
- Typical pumping down time: 3 hours (starting from warm cryopump)
- Metals in stock: Chromium, gold
