FOM Name: XRD Panalytical XPert MRD
Model: Malvern Panalytical Xpert MRD
Contact: Don Savage (dsavage@wisc.edu, 608-263-0831)
Center: NIAC
Location: ERB Rm 832
The Panalytical XPert x-ray diffractomer is a high resolution diffraction system consisting of a highly monochromatic beam with a well-defined wavelength and equatorial divergence. An X-ray mirror and a high-resolution monochromator are placed in line to deliver an incident X-ray beam that is not only highly monochromatic with a low divergence, but also has a high intensity. Reflectometry measurements can also be performed to identify layer thickness, density and surface roughness.
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Configuration
High Resolution Setup
- Six-axis sample stage on high resolution goniometer.
Absolute angular resolution = 0.0001 degrees. - Hybrid monochromater consisting of closely coupled x-ray mirror and 4 bounce Ge 220 monochromator.
Resolution = 18 arc-seconds. - Diffracted beam optics-
Fixed slit or Three bounce Ge 220 analyzer. Resolution = 12 arc-second
Reflectometry setup
- Diffracted beam optics:
0.27 degree collimator with graphite monochrometer
or 0.09 degree collimator
