Zygo Optical Profilometer

FOM Name: Zygo New View
Model: Zygo New view 9000
Contact: John Jacobs (jacobs@engr.wisc.edu, 608-262-3787)
Center:  NIAC
Location:  MSE Room 177

The Zygo New View 9000 is a scanning white light and optical phase-shifting interferometer used for quantifying surface roughness, step heights and other topographical features.  The measurements are fast and non-destructive. The Zygo is equipped with 1X to 50X objectives which provide a field of view from 0.09 to 17 mm – expandable with stitching

This is an accordion element with a series of buttons that open and close related content panels.


  • Vertical Scan Range: 145 µm with high resolution piezo drive;
    20 mm with motor drive
  • Surface Topography Repeatability: 08 nm
  • Lateral Resolution: 43 to 17 um; objective dependent
  • Data Scan Rate: 69 µm/sec @ 1000 x 1000 pixels
  • RMS Repeatability: < 0.01 nm
  • Step Height Accuracy: 3%
  • Step Height Repeatability: 1%

Additional Information