Zygo Interferometer

FOM Name: Zygo New View
Model: Zygo New view 6300
Contact: John Jacobs (jacobs@engr.wisc.edu, 608-262-3787)
Center:  NIAC
Location:  MSE Room 177

The Zygo New View 6300 is a scanning white light and optical phase-shifting interferometer used for quantifying surface roughness, step heights and other topographical features.  The measurements are fast and non-destructive. The Zygo is equipped with a range of objectives and has a field of view from 0.04 to 21.9 mm.

This is an accordion element with a series of buttons that open and close related content panels.

Configuration

  • Vertical Scan Range: 150 µm
  • Vertical Res. Up to 0.1 nm
  • Lateral Res. 0.43 to 11.6 µm; objective dependent
  • Data Scan Rate: 14 µm/sec; optional to 85 µm/sec
    sampling array dependent
  • Maximum Data Points: 307,200
  • RMS Repeatability < 0.1 nm
  • RM step Height Accuracy ? 0.75%
  • Repeatability ? 0.1% @ 1?