State-of-the-Art, Reactive-Ion-Etching Instrument for Nanofabrication of Devices at UW–Madison

UW-Madison has established itself as a national leader in the area of nano-structured semiconductor materials and devices. This project provides acquisition of a reactive-ion etching (RIE) system to allow researchers on campus to further push the envelope on the emerging fields of semiconductor nano-fabrication and nano-manufacturing. The etching system, called APEX SLR, working in conjunction […]

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