UW-Madison has established itself as a national leader in the area of nano-structured semiconductor materials and devices. This project provides acquisition of a reactive-ion etching (RIE) system to allow researchers on campus to further push the envelope on the emerging fields of semiconductor nano-fabrication and nano-manufacturing. The etching system, called APEX SLR, working in conjunction […]
Read the full article at: https://research.wisc.edu/funding/uw2020/round-4-projects/reactive-ion-etching-nanofabrication/