WCNT acquires new Atomic Layer Deposition System

The Wisconsin Centers for Nanoscale Technology installed a new Veeco Fiji G2 Atomic Layer deposition System. Funding was provided by the Physics Department, Physics Professors Brar, Eriksson and McDermott, L&S and COE. The system is currently installed in the Nanoscale Fabrication Center and ready for use.


  • ALD system with 6 precursor lines.
  • 200mm chuck capable of heating to 300 deg. C
  • Plasma generator for N2, O2 and H2
  • Ozone generator.
  • ALD Booster System
  • LVPD system