WCNT acquires Secondary Ion Mass Spectrometer


The Wisconsin Centers for Nanoscale Technology installed a Cameca IMS 4f-E7 Magnetic Sector Secondary Ion Mass Spectrometer. The system was donated to UW-Madison by Air Force Research Labs. The system will be available in Spring 2021.

  • Double focusing analyzer allows filtering of the secondary ions to reduce contribution from different species at the same nominal mass
  • Depth profiling of dopants and contamination with sub-ppm detection limits
  • Cesium and Oxygen sources for optimal detection limits of different elements
  • Variable ion impact energy for high depth resolution measurements